@phdthesis{oai:shibaura.repo.nii.ac.jp:00000039, author = {芳賀, 絵美}, month = {2015-08-19}, note = {2014}, school = {芝浦工業大学}, title = {対向拡散CVD法によるシリカ複合膜の細孔径制御}, year = {}, yomi = {ハガ, エミ} }