@phdthesis{oai:shibaura.repo.nii.ac.jp:00000152,
 author = {Muhammad Aiman bin Mohd Nor and Muhammad Aiman bin Mohd Nor},
 month = {2021-01-21},
 note = {2019年度},
 school = {芝浦工業大学},
 title = {Research on the Unified Threshold Criteria of Installed Filter Leak Test in Cleanrooms},
 year = {}
}