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Research on the Unified Threshold Criteria of Installed Filter Leak Test in Cleanrooms
https://shibaura.repo.nii.ac.jp/records/152
https://shibaura.repo.nii.ac.jp/records/1521c4ea42c-2c3f-48db-ba81-1fda7b64975a
名前 / ファイル | ライセンス | アクション |
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博士論文_甲第260号 (22.3 MB)
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Item type | 学位論文 / Thesis or Dissertation(1) | |||||
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公開日 | 2021-01-21 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Research on the Unified Threshold Criteria of Installed Filter Leak Test in Cleanrooms | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_db06 | |||||
資源タイプ | doctoral thesis | |||||
著者 |
Muhammad Aiman bin Mohd Nor
× Muhammad Aiman bin Mohd Nor× Muhammad Aiman bin Mohd Nor |
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学位名 | ||||||
学位名 | 博士(工学) | |||||
学位授与機関 | ||||||
学位授与機関名 | 芝浦工業大学 | |||||
学位授与年度 | ||||||
内容記述タイプ | Other | |||||
内容記述 | 2019年度 | |||||
学位授与年月日 | ||||||
学位授与年月日 | 2020-03-18 | |||||
学位授与番号 | ||||||
学位授与番号 | 3261甲第259号 |